Study on the monitoring system for FMS

New monitoring method in FMS was introduced in this paper and the system of MSF (Monitoring System of FMS), developed by the authors was described in detail. In order to push FMS technology forward, and enhance flexibility of operators, equipment and processing in FMS, the authors have made some break-through in traditional ways, in which only single equipment were monitored and self-treated, introduced the idea of integrated inspection. It made the MSF more practicable. The working status of FMS can be monitored by the CRT of MSF system. System troubles will be shown with icons, flash of the characteristic symbol or alarming of the system, so that operators will know information of troubles. This will explores a new way for FMS inspection in a whole integrated manner.