SU-8 lift-off patterned silicone chemical vapor sensor arrays

Victor T.S. Wong; Adam Huang; Chih Ming Ho

doi:10.1109/MEMSYS.2005.1454039

SU-8 lift-off patterned silicone chemical vapor sensor arrays

Victor T.S. Wong, Adam Huang, Chih Ming Ho

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

16 Scopus citations

Abstract

This paper reports on the fabrication and preliminary characterizations of our micro-machined silicone/carbon black chemical vapor sensor arrays. By utilizing SU-8 lift-off technique, we have successfully patterned room temperature vulcanizing (RTV) polymers down to 25 μm feature size using low resolution mask (with line-width of 5 - 10μm) with yields in excess of 90% throughout a 4" silicon wafer. Based on this technique, we have fabricated the smallest functional polymer/carbon black based chemical vapor sensor (60×60×25μm³) reported in the literature known to the authors thus far. Preliminary characterizations showed that the sensors are capable of sensing alcohols and acetone in the range from 2.5ppth to 12.5ppth with response time down to 5 seconds.

Original language	English (US)
Title of host publication	Proceedings of the 18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 Miami - Technical Digest
Pages	754-757
Number of pages	4
DOIs	https://doi.org/10.1109/MEMSYS.2005.1454039
State	Published - 2005
Event	18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 Miami - Miami Beach, FL, United States Duration: Jan 30 2005 → Feb 3 2005

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)	1084-6999

Other

Other	18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 Miami
Country/Territory	United States
City	Miami Beach, FL
Period	1/30/05 → 2/3/05

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

Access to Document

10.1109/MEMSYS.2005.1454039

Cite this

Wong, V. T. S., Huang, A., & Ho, C. M. (2005). SU-8 lift-off patterned silicone chemical vapor sensor arrays. In Proceedings of the 18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 Miami - Technical Digest (pp. 754-757). Article WP24 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). https://doi.org/10.1109/MEMSYS.2005.1454039

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title = "SU-8 lift-off patterned silicone chemical vapor sensor arrays",

abstract = "This paper reports on the fabrication and preliminary characterizations of our micro-machined silicone/carbon black chemical vapor sensor arrays. By utilizing SU-8 lift-off technique, we have successfully patterned room temperature vulcanizing (RTV) polymers down to 25 μm feature size using low resolution mask (with line-width of 5 - 10μm) with yields in excess of 90% throughout a 4{"} silicon wafer. Based on this technique, we have fabricated the smallest functional polymer/carbon black based chemical vapor sensor (60×60×25μm3) reported in the literature known to the authors thus far. Preliminary characterizations showed that the sensors are capable of sensing alcohols and acetone in the range from 2.5ppth to 12.5ppth with response time down to 5 seconds.",

author = "Wong, {Victor T.S.} and Adam Huang and Ho, {Chih Ming}",

note = "Copyright: Copyright 2011 Elsevier B.V., All rights reserved.; 18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 Miami ; Conference date: 30-01-2005 Through 03-02-2005",

year = "2005",

doi = "10.1109/MEMSYS.2005.1454039",

language = "English (US)",

isbn = "0780387325",

series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

pages = "754--757",

booktitle = "Proceedings of the 18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 Miami - Technical Digest",

}

Wong, VTS, Huang, A & Ho, CM 2005, SU-8 lift-off patterned silicone chemical vapor sensor arrays. in Proceedings of the 18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 Miami - Technical Digest., WP24, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 754-757, 18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 Miami, Miami Beach, FL, United States, 1/30/05. https://doi.org/10.1109/MEMSYS.2005.1454039

SU-8 lift-off patterned silicone chemical vapor sensor arrays. / Wong, Victor T.S.; Huang, Adam; Ho, Chih Ming.
Proceedings of the 18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 Miami - Technical Digest. 2005. p. 754-757 WP24 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

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AU - Huang, Adam

AU - Ho, Chih Ming

PY - 2005

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N2 - This paper reports on the fabrication and preliminary characterizations of our micro-machined silicone/carbon black chemical vapor sensor arrays. By utilizing SU-8 lift-off technique, we have successfully patterned room temperature vulcanizing (RTV) polymers down to 25 μm feature size using low resolution mask (with line-width of 5 - 10μm) with yields in excess of 90% throughout a 4" silicon wafer. Based on this technique, we have fabricated the smallest functional polymer/carbon black based chemical vapor sensor (60×60×25μm3) reported in the literature known to the authors thus far. Preliminary characterizations showed that the sensors are capable of sensing alcohols and acetone in the range from 2.5ppth to 12.5ppth with response time down to 5 seconds.

AB - This paper reports on the fabrication and preliminary characterizations of our micro-machined silicone/carbon black chemical vapor sensor arrays. By utilizing SU-8 lift-off technique, we have successfully patterned room temperature vulcanizing (RTV) polymers down to 25 μm feature size using low resolution mask (with line-width of 5 - 10μm) with yields in excess of 90% throughout a 4" silicon wafer. Based on this technique, we have fabricated the smallest functional polymer/carbon black based chemical vapor sensor (60×60×25μm3) reported in the literature known to the authors thus far. Preliminary characterizations showed that the sensors are capable of sensing alcohols and acetone in the range from 2.5ppth to 12.5ppth with response time down to 5 seconds.

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T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

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Wong VTS, Huang A, Ho CM. SU-8 lift-off patterned silicone chemical vapor sensor arrays. In Proceedings of the 18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 Miami - Technical Digest. 2005. p. 754-757. WP24. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMSYS.2005.1454039

SU-8 lift-off patterned silicone chemical vapor sensor arrays

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