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Keyphrases
Actuator
100%
Lead Zirconate Titanate
100%
Temperature Rise
100%
Self-heating
100%
Micro-electro-mechanical Systems
100%
PZT Film
50%
PZT Thin Films
50%
High Thermal Conductivity
50%
Volumetric Heat Generation
50%
Heat Dissipation
50%
Nanoparticles
25%
Energy Loss
25%
Device Performance
25%
Elastic Layer
25%
Suboptimal Temperature
25%
Si Substrate
25%
High Energy Density
25%
Substrate Effect
25%
Hysteresis Loss
25%
Thermal Management Applications
25%
Domain Wall Motion
25%
Modeling Results
25%
Effective Temperature
25%
Low Driving Voltage
25%
Glass Substrate
25%
Operational Temperature
25%
PZT-Based
25%
Device Reliability
25%
Device Temperature
25%
PZT Actuator
25%
Large-scale Motions
25%
Raman Thermometry
25%
Residual Si
25%
Finite Element Thermal Model
25%
Engineering
Microelectromechanical System
100%
Titanate
100%
Lead Zirconate
100%
Temperature Rise
100%
Actuator
100%
Thin Films
50%
Heat Generation
50%
High Thermal Conductivity
50%
Heat Losses
50%
Nanoparticle
25%
Energy Dissipation
25%
Device Performance
25%
Thin Layer
25%
Si Substrate
25%
Domain Wall
25%
Thermal Model
25%
Hysteresis Loss
25%
Drive Voltage
25%
Released Structure
25%
Finite Element Analysis
25%
Flux Density
25%
Glass Substrate
25%
Material Science
Actuator
100%
Microelectromechanical System
100%
Lead Zirconate Titanate
100%
Film
75%
Thin Films
50%
Thermal Conductivity
50%
Finite Element Method
25%
Nanoparticle
25%
Domain Wall
25%
High Energy Density
25%
Chemical Engineering
Microelectromechanical System
100%
Film
100%
Thermal Conductivity
40%
Chilling
40%
Nanoparticle
20%