@inproceedings{4db4e97df3a94774947dacc685780dd1,
title = "Super High-Frequency Scandium Aluminum Nitride Crystalline Film Bulk Acoustic Resonators",
abstract = "This work presents promising results of overtone thickness resonance modes of film bulk acoustic resonators (FBARs) operating at Ku band, traditionally perceived unachievable by acoustic devices. We take advantage of the epitaxial growth of the bottom metal electrode, as well as the piezoelectric layer to improve thin-film crystal quality and hence quality factor (Q). This work is the first demonstration of a multi-GHz FBAR realized on single-crystalline Sc0.12Al0.88N/Mo stack.",
author = "Mingyo Park and Jialin Wang and Rytis Dargis and Andrew Clark and Azadeh Ansari",
note = "Publisher Copyright: {\textcopyright} 2019 IEEE.; 2019 IEEE International Ultrasonics Symposium, IUS 2019 ; Conference date: 06-10-2019 Through 09-10-2019",
year = "2019",
month = oct,
doi = "10.1109/ULTSYM.2019.8925598",
language = "English (US)",
series = "IEEE International Ultrasonics Symposium, IUS",
publisher = "IEEE Computer Society",
pages = "1689--1692",
booktitle = "2019 IEEE International Ultrasonics Symposium, IUS 2019",
address = "United States",
}