TY - JOUR
T1 - Surface acoustic load sensing using a face-shear PIN-PMN-PT single-crystal resonator
AU - Kim, Kyungrim
AU - Zhang, Shujun
AU - Jiang, Xiaoning
N1 - Funding Information:
manuscript received march 15, 2012; accepted august 8, 2012. The work is partially supported by the north carolina state career development Fund provided to X. Jiang. K. Kim and X. Jiang are with the department of mechanical and aerospace Engineering, north carolina state University, raleigh, nc (e-mail: [email protected]). s. Zhang is with materials research Institute, The Pennsylvania state University, University Park, Pa. doI http://dx.doi.org/10.1109/TUFFc.2012.2488
PY - 2012
Y1 - 2012
N2 - Pb(In0.5Nb0.5)O3¿Pb(Mg 1/3Nb2/3)O3¿PbTiO3 (PIN¿PMN¿PT) resonators for surface acoustic load sensing are presented in this paper. Different acoustic loads are applied to thickness mode, thickness-shear mode, and face-shear mode resonators, and the electrical impedances at resonance and anti-resonance frequencies are recorded. More than one order of magnitude higher sensitivity (ratio of electrical impedance change to surface acoustic impedance change) at the resonance is achieved for the face-shear-mode resonator compared with other resonators with the same dimensions. The Krimholtz, Leedom, and Matthaei (KLM) model is used to verify the surface acoustic loading effect on the electrical impedance spectrum of face-shear PIN¿PMN¿PT single-crystal resonators. The demonstrated high sensitivity of face-shear mode resonators to surface loads is promising for a broad range of applications, including artificial skin, biological and chemical sensors, touch screens, and other touch-based sensors.
AB - Pb(In0.5Nb0.5)O3¿Pb(Mg 1/3Nb2/3)O3¿PbTiO3 (PIN¿PMN¿PT) resonators for surface acoustic load sensing are presented in this paper. Different acoustic loads are applied to thickness mode, thickness-shear mode, and face-shear mode resonators, and the electrical impedances at resonance and anti-resonance frequencies are recorded. More than one order of magnitude higher sensitivity (ratio of electrical impedance change to surface acoustic impedance change) at the resonance is achieved for the face-shear-mode resonator compared with other resonators with the same dimensions. The Krimholtz, Leedom, and Matthaei (KLM) model is used to verify the surface acoustic loading effect on the electrical impedance spectrum of face-shear PIN¿PMN¿PT single-crystal resonators. The demonstrated high sensitivity of face-shear mode resonators to surface loads is promising for a broad range of applications, including artificial skin, biological and chemical sensors, touch screens, and other touch-based sensors.
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U2 - 10.1109/TUFFC.2012.2488
DO - 10.1109/TUFFC.2012.2488
M3 - Article
C2 - 23192819
AN - SCOPUS:84869404580
SN - 0885-3010
VL - 59
SP - 2548
EP - 2554
JO - IEEE transactions on ultrasonics, ferroelectrics, and frequency control
JF - IEEE transactions on ultrasonics, ferroelectrics, and frequency control
IS - 11
M1 - 6343282
ER -