Surface acoustic wave sensors of delay lines based on MEMS

Li Haofeng, Jia Rui, Li Weilong, Chen Chen, Liu Xinyu

Research output: Contribution to journalArticlepeer-review

4 Scopus citations

Abstract

A high frequency Surface Acoustic Wave (SAW) filter which is the key point of the SAW sensor is made by MEMS technology. The SAW filter used for sensors needs to have the factors of high frequency, low loss and high quality factor. In order to satisfy the performance of the factors, the SAW delay lines of Electrode Wave Control Single Phase Unidirectional Transducer (EWC/SPUDT) are used in the filter. This transducer can be considered as the networks of connection of some units of IDTs and the loss of device can be effectively reduced. Based on the Coupling of Modes (COM) theory and equivalent circuit modal, the mixed matrix (P matrix) of the transducers can be deduced, and further, the response of the delay lines can be obtained. According to the calculated results, a mask layout is made. Then the SAW delay line is completed and found to agree with the theoretical simulation. Its center frequency is 503 MHz and insertion loss is low enough for use of sensors .

Original languageEnglish (US)
Pages (from-to)7258-7261
Number of pages4
JournalJournal of Nanoscience and Nanotechnology
Volume10
Issue number11
DOIs
StatePublished - Nov 2010

All Science Journal Classification (ASJC) codes

  • Bioengineering
  • General Chemistry
  • Biomedical Engineering
  • General Materials Science
  • Condensed Matter Physics

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