Abstract
Report on the study of the mechanism of dc surface current flow between two electrodes formed on the surface of ultra-thin ( less than 50 Angstrom) SiO//2 layer thermally grown on Si substrate. This mechanism is found to be dependent upon the applied voltage range, and the density of mobile ions localized on the oxide surface. The experiments can furnish valuable information on the condition of outer surface of ultra-thin SiO//2 layer providing appropriate interpretation of the obtained I-V characteristics.
| Original language | English (US) |
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| Pages | 583-586 |
| Number of pages | 4 |
| State | Published - Jan 1 1977 |
| Event | Proc of the Int Vac Congr, 7th, and the Int Conf on Solid Surf, 3rd, of the Int Union for Vac Sci, Tech and Appl - Vienna, Austria Duration: Sep 12 1977 → Sep 16 1977 |
Other
| Other | Proc of the Int Vac Congr, 7th, and the Int Conf on Solid Surf, 3rd, of the Int Union for Vac Sci, Tech and Appl |
|---|---|
| City | Vienna, Austria |
| Period | 9/12/77 → 9/16/77 |
All Science Journal Classification (ASJC) codes
- General Engineering