Cleaning of silicon surfaces in chlorine based remote plasma can lead to roughening of the cleaned surface. In this paper, correlation between surface damage and various parameters of the remote plasma cleaning are determined. An ultrathin oxide grown prior to cleaning or addition of oxygen to the gaseous cleaning mixture are studied as a means to control surface damage.
|Number of pages
|Proceedings - The Electrochemical Society
|Published - 1990
All Science Journal Classification (ASJC) codes
- General Engineering