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Surface-imaged silicon polymers for 193-nm excimer laser lithography
Roderick R. Kunz, Mark W. Horn, R. B. Goodman, Patricia A. Bianconi, David A. Smith, J. R. Eshelman, Gregory M. Wallraff, Robert D. Miller, Eric J. Ginsburg
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
13
Scopus
citations