Surface Micromachined Microelectromechancial Ohmic Series Switch Using Thin-Film Piezoelectric Actuators

Keyphrases

• Piezoelectric Actuator 100%
• Piezoelectric Thin Film 100%
• Ohmic 100%
• Surface Micromachining 100%
• Series Switch 100%
• Actuation Voltage 66%
• Circuitry 33%
• Elastic Layer 33%
• Elevated Temperature 33%
• Switching Speed 33%
• Stress Control 33%
• Solution Chemistry 33%
• Switching Operation 33%
• Insertion Loss 33%
• Sensitivity Measurement 33%
• Substrate Loss 33%
• Titanate 33%
• Closed State 33%
• Thermal Sensitivity 33%

Engineering

• Thin Films 100%
• Piezoelectric Actuator 100%
• Actuation 66%
• Silicon Substrate 33%
• Switching Speed 33%
• Electric Lines 33%
• Titanate 33%
• Applied Voltage 33%
• Elevated Temperature 33%
• Waveguide 33%
• Insertion Loss 33%
• Measurement Sensitivity 33%
• Closed State 33%