Surface passivation of nano-textured silicon solar cells by atomic layer deposited Al₂O₃ films

Material Science

• Film 100%
• Al2O3 100%
• Silicon Solar Cell 100%
• Surface Passivation 100%
• Silicon 57%
• Solar Cell 28%
• Silver 14%
• Rough Surface 14%
• Defect Density 14%
• Wet Etching 14%

Engineering

• Nanomaterial 100%
• Passivation 100%
• Atomic Layer 100%
• Passivation Layer 50%
• Cell Performance 25%
• Surface Field 25%
• Defect Density 25%

Keyphrases

• Field-effect Passivation 33%
• SiNx Passivation 33%
• Silver-catalyzed 33%
• Al2O3 Passivation 33%
• Al2O3 Passivation Layer 33%
• Negative Fixed Charge 33%