Surface profile measurement using a unique microtube-based system

Shizhuo Yin, Jiang Li, Minho Song

Research output: Contribution to journalArticlepeer-review

8 Scopus citations

Abstract

A unique method for surface profile measurement is described. A microtube attached with an objective microlens is used to scan the sample surface so that the surface profile can be obtained. The unique features of using a microtube are low alignment requirement and high robustness. With different focal lengths of microlenses, we could get a depth measurement range from 10 to 400 μm with a submicron to nm range depth resolution. To verify the feasibility of the proposed system, a profile obtained by this method is compared with the result obtained by using conventional stylus measurement. The results from the two methods are consistent.

Original languageEnglish (US)
Pages (from-to)1-6
Number of pages6
JournalOptics Communications
Volume168
Issue number1
DOIs
StatePublished - Sep 1 1999

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Physical and Theoretical Chemistry
  • Electrical and Electronic Engineering

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