Surface profile measurement using a unique microtube-based system

Shizhuo Yin; Jiang Li; Minho Song

doi:10.1016/S0030-4018(99)00334-X

Surface profile measurement using a unique microtube-based system

Shizhuo Yin
, Jiang Li
, Minho Song

Electrical Engineering

Research output: Contribution to journal › Article › peer-review

8 Scopus citations

Abstract

A unique method for surface profile measurement is described. A microtube attached with an objective microlens is used to scan the sample surface so that the surface profile can be obtained. The unique features of using a microtube are low alignment requirement and high robustness. With different focal lengths of microlenses, we could get a depth measurement range from 10 to 400 μm with a submicron to nm range depth resolution. To verify the feasibility of the proposed system, a profile obtained by this method is compared with the result obtained by using conventional stylus measurement. The results from the two methods are consistent.

Original language	English (US)
Pages (from-to)	1-6
Number of pages	6
Journal	Optics Communications
Volume	168
Issue number	1
DOIs	https://doi.org/10.1016/S0030-4018(99)00334-X
State	Published - Sep 1 1999

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Atomic and Molecular Physics, and Optics
Physical and Theoretical Chemistry
Electrical and Electronic Engineering

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10.1016/S0030-4018(99)00334-X

Cite this

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title = "Surface profile measurement using a unique microtube-based system",

abstract = "A unique method for surface profile measurement is described. A microtube attached with an objective microlens is used to scan the sample surface so that the surface profile can be obtained. The unique features of using a microtube are low alignment requirement and high robustness. With different focal lengths of microlenses, we could get a depth measurement range from 10 to 400 μm with a submicron to nm range depth resolution. To verify the feasibility of the proposed system, a profile obtained by this method is compared with the result obtained by using conventional stylus measurement. The results from the two methods are consistent.",

author = "Shizhuo Yin and Jiang Li and Minho Song",

note = "Funding Information: The partial financial support of this research project from the US Army Research Office, (Grant Number: P-34711-OH-YIP) is gratefully acknowledged. We also acknowledge Mr. Chung-Chen Kuo's help during the measurement of the surface profile with stylus profiler. We also would like to thank Mr. Dana Anderson for his help with editing the manuscript.",

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doi = "10.1016/S0030-4018(99)00334-X",

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T1 - Surface profile measurement using a unique microtube-based system

AU - Yin, Shizhuo

AU - Li, Jiang

AU - Song, Minho

N1 - Funding Information: The partial financial support of this research project from the US Army Research Office, (Grant Number: P-34711-OH-YIP) is gratefully acknowledged. We also acknowledge Mr. Chung-Chen Kuo's help during the measurement of the surface profile with stylus profiler. We also would like to thank Mr. Dana Anderson for his help with editing the manuscript.

PY - 1999/9/1

Y1 - 1999/9/1

N2 - A unique method for surface profile measurement is described. A microtube attached with an objective microlens is used to scan the sample surface so that the surface profile can be obtained. The unique features of using a microtube are low alignment requirement and high robustness. With different focal lengths of microlenses, we could get a depth measurement range from 10 to 400 μm with a submicron to nm range depth resolution. To verify the feasibility of the proposed system, a profile obtained by this method is compared with the result obtained by using conventional stylus measurement. The results from the two methods are consistent.

AB - A unique method for surface profile measurement is described. A microtube attached with an objective microlens is used to scan the sample surface so that the surface profile can be obtained. The unique features of using a microtube are low alignment requirement and high robustness. With different focal lengths of microlenses, we could get a depth measurement range from 10 to 400 μm with a submicron to nm range depth resolution. To verify the feasibility of the proposed system, a profile obtained by this method is compared with the result obtained by using conventional stylus measurement. The results from the two methods are consistent.

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DO - 10.1016/S0030-4018(99)00334-X

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AN - SCOPUS:0032646181

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SP - 1

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JO - Optics Communications

JF - Optics Communications

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Surface profile measurement using a unique microtube-based system

Abstract

All Science Journal Classification (ASJC) codes

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