Surface sol-gel synthesis of ultrathin titanium and tantalum oxide films

Mingming Fang, Chy Hyung Kim, Benjamin R. Martin, Thomas E. Mallouk

Research output: Contribution to journalArticlepeer-review

30 Scopus citations


TiO2, Ta2O5, and mixed TiO2, Ta2O5 ultrathin films were grown layer-by-layer using a surface sol-gel deposition technique. The technique allows one to prepare smooth films of mixed composition with Ångstrom-level control of thickness. The thickness increases per adsorption/hydrolysis cycle were 4.5, 2.1, and 2.5 Å, respectively, for TiO2, Ta2O5and mixed TiO2/ Ta2O5 (1.6:1) films. By combining X-ray diffraction and ellipsometric analysis, it was determined that the as-deposited TiO2 films are less dense than bulk TiO2, and do not adhere persistently to Si/SiO2 or Au/2-mercaptoethanol substrates. These 'green' films were annealed at 400°C to produce denser and highly adherent films. Patterning the surface by microcontact printing of siloxane polymer thin films allows one to prepare patterned sol-gel oxide thin films.

Original languageEnglish (US)
Pages (from-to)43-49
Number of pages7
JournalJournal of Nanoparticle Research
Issue number1
StatePublished - 1999

All Science Journal Classification (ASJC) codes

  • Bioengineering
  • Chemistry(all)
  • Atomic and Molecular Physics, and Optics
  • Modeling and Simulation
  • Materials Science(all)
  • Condensed Matter Physics


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