TY - JOUR
T1 - Synthesis of silicon carbide thin films with polycarbosilane (PCS)
AU - Colombo, Paolo
AU - Paulson, Thomas E.
AU - Pantano, Carlo G.
PY - 1997/9
Y1 - 1997/9
N2 - Polycarbosilane (PCS) thin films were deposited on silicon (and other) substrates and heat treated under vacuum (∼10-6 torr) at temperatures in the range of 200°-1200°C. At temperatures in the range of 1000°-1200°C, the initially amorphous PCS films transformed to polycrystalline β-silicon carbide (β-SiC). Although PCS films could be deposited at thickness up to 2 μm, the films with thicknesses >1 μm could not be transformed to SiC without extensive cracking. The resulting SiC coatings were characterized using Fourier transform infrared spectroscopy, glancing-angle X-ray diffractometry, secondary-ion mass spectroscopy, Raman spectoscopy, transmission electron microscopy, and scanning electron microscopy. The temperature and time dependence of the amorphous-to-crystalline transition could be associated with the evolution of free carbon, oxygen, and hydrogen in the films.
AB - Polycarbosilane (PCS) thin films were deposited on silicon (and other) substrates and heat treated under vacuum (∼10-6 torr) at temperatures in the range of 200°-1200°C. At temperatures in the range of 1000°-1200°C, the initially amorphous PCS films transformed to polycrystalline β-silicon carbide (β-SiC). Although PCS films could be deposited at thickness up to 2 μm, the films with thicknesses >1 μm could not be transformed to SiC without extensive cracking. The resulting SiC coatings were characterized using Fourier transform infrared spectroscopy, glancing-angle X-ray diffractometry, secondary-ion mass spectroscopy, Raman spectoscopy, transmission electron microscopy, and scanning electron microscopy. The temperature and time dependence of the amorphous-to-crystalline transition could be associated with the evolution of free carbon, oxygen, and hydrogen in the films.
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U2 - 10.1111/j.1151-2916.1997.tb03124.x
DO - 10.1111/j.1151-2916.1997.tb03124.x
M3 - Article
AN - SCOPUS:0031237946
SN - 0002-7820
VL - 80
SP - 2333
EP - 2340
JO - Journal of the American Ceramic Society
JF - Journal of the American Ceramic Society
IS - 9
ER -