Synthesis of two dimensional materials for beyond graphene devices

Kehao Zhang; Sarah Eichfeld; Jacob Leach; Bob Metzger; Yu Chuan Lin; Keith Evansb; Joshua A. Robinson

doi:10.1117/12.2177985

Synthesis of two dimensional materials for beyond graphene devices

Kehao Zhang, Sarah Eichfeld, Jacob Leach, Bob Metzger, Yu Chuan Lin, Keith Evansb, Joshua A. Robinson

Research output: Contribution to journal › Conference article › peer-review

3 Scopus citations

Abstract

In this paper, we present an overview of the currently employed techniques to synthesize two-dimensional materials, focusing on MoS2 and WSe2, and summarize the progress reported to-date. Here we discuss the importance of controlling reactor geometries to improve film uniformity and quality for MoS2 through a combination of modeling and experimental design. In addition, development of processes scalable to provide wafer scale uniformity is explored using synthesis of WSe2 via metal-organic chemical vapor deposition. Finally, we discuss the impact of each of these processes for TMD synthesis on epitaxial graphene.

Original language	English (US)
Article number	94670O
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	9467
Issue number	January
DOIs	https://doi.org/10.1117/12.2177985
State	Published - 2015
Event	2015 Micro- and Nanotechnology (MNT) Sensors, Systems, and Applications VII Conference - Baltimore, United States Duration: Apr 20 2015 → Apr 24 2015

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

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10.1117/12.2177985

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title = "Synthesis of two dimensional materials for beyond graphene devices",

abstract = "In this paper, we present an overview of the currently employed techniques to synthesize two-dimensional materials, focusing on MoS2 and WSe2, and summarize the progress reported to-date. Here we discuss the importance of controlling reactor geometries to improve film uniformity and quality for MoS2 through a combination of modeling and experimental design. In addition, development of processes scalable to provide wafer scale uniformity is explored using synthesis of WSe2 via metal-organic chemical vapor deposition. Finally, we discuss the impact of each of these processes for TMD synthesis on epitaxial graphene.",

author = "Kehao Zhang and Sarah Eichfeld and Jacob Leach and Bob Metzger and Lin, {Yu Chuan} and Keith Evansb and Robinson, {Joshua A.}",

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T1 - Synthesis of two dimensional materials for beyond graphene devices

AU - Zhang, Kehao

AU - Eichfeld, Sarah

AU - Leach, Jacob

AU - Metzger, Bob

AU - Lin, Yu Chuan

AU - Evansb, Keith

AU - Robinson, Joshua A.

PY - 2015

Y1 - 2015

N2 - In this paper, we present an overview of the currently employed techniques to synthesize two-dimensional materials, focusing on MoS2 and WSe2, and summarize the progress reported to-date. Here we discuss the importance of controlling reactor geometries to improve film uniformity and quality for MoS2 through a combination of modeling and experimental design. In addition, development of processes scalable to provide wafer scale uniformity is explored using synthesis of WSe2 via metal-organic chemical vapor deposition. Finally, we discuss the impact of each of these processes for TMD synthesis on epitaxial graphene.

AB - In this paper, we present an overview of the currently employed techniques to synthesize two-dimensional materials, focusing on MoS2 and WSe2, and summarize the progress reported to-date. Here we discuss the importance of controlling reactor geometries to improve film uniformity and quality for MoS2 through a combination of modeling and experimental design. In addition, development of processes scalable to provide wafer scale uniformity is explored using synthesis of WSe2 via metal-organic chemical vapor deposition. Finally, we discuss the impact of each of these processes for TMD synthesis on epitaxial graphene.

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DO - 10.1117/12.2177985

M3 - Conference article

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SN - 0277-786X

VL - 9467

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

IS - January

M1 - 94670O

T2 - 2015 Micro- and Nanotechnology (MNT) Sensors, Systems, and Applications VII Conference

Y2 - 20 April 2015 through 24 April 2015

ER -

Synthesis of two dimensional materials for beyond graphene devices

Abstract

All Science Journal Classification (ASJC) codes

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