Abstract
In this paper, we present an overview of the currently employed techniques to synthesize two-dimensional materials, focusing on MoS2 and WSe2, and summarize the progress reported to-date. Here we discuss the importance of controlling reactor geometries to improve film uniformity and quality for MoS2 through a combination of modeling and experimental design. In addition, development of processes scalable to provide wafer scale uniformity is explored using synthesis of WSe2 via metal-organic chemical vapor deposition. Finally, we discuss the impact of each of these processes for TMD synthesis on epitaxial graphene.
| Original language | English (US) |
|---|---|
| Article number | 94670O |
| Journal | Proceedings of SPIE - The International Society for Optical Engineering |
| Volume | 9467 |
| Issue number | January |
| DOIs | |
| State | Published - 2015 |
| Event | 2015 Micro- and Nanotechnology (MNT) Sensors, Systems, and Applications VII Conference - Baltimore, United States Duration: Apr 20 2015 → Apr 24 2015 |
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Computer Science Applications
- Applied Mathematics
- Electrical and Electronic Engineering
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