Abstract
In this paper, we present a system-level simulation and analysis of a diffractive optical MEM Grating Light Valve. The simulations are performed in a system-level multi-domain CAD framework developed at the University of Pittsburgh. Including the electrical, mechanical, and optical domains, this framework allows the user to design micro-optical systems by examining performance measures of the entire system. In this paper, we provide a brief background of the models that are used for signal and device simulation, and use these results for the simulation and analysis of the promising GLV device for applications in a projection system.
Original language | English (US) |
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Pages (from-to) | 160-171 |
Number of pages | 12 |
Journal | Proceedings of SPIE - The International Society for Optical Engineering |
Volume | 4985 |
DOIs | |
State | Published - May 26 2003 |
Event | MOEMS Display and Imaging Systems - San Jose, CA, United States Duration: Jan 28 2003 → Jan 29 2003 |
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Computer Science Applications
- Applied Mathematics
- Electrical and Electronic Engineering