TEM and electrical analysis of sputtered barium strontium titanate (BST) thin films on flexible copper substrates

Brian Laughlin; Jon Ihlefeld; Jon Paul Maria

doi:10.1557/proc-784-c5.3

TEM and electrical analysis of sputtered barium strontium titanate (BST) thin films on flexible copper substrates

Brian Laughlin, Jon Ihlefeld, Jon Paul Maria

Materials Science and Engineering

Research output: Contribution to journal › Conference article › peer-review

12 Scopus citations

Abstract

Ba_0.6Sr_0.4TiO₃ (BST) films were deposited on copper foils by radio frequency magnetron sputtering. These films will be an integral part of flexible capacitor sheets intended for space borne re-configurable antenna arrays. By the use of controlled pO₂ high temperature anneals, the films were fully crystallized in the absence of substrate oxidation. X-ray diffraction and transmission electron microscopy (TEM) showed no existence of copper oxidation (i.e. Cu₂O or CuO phases). The deposited BST films exhibit a high permittivity (625) and a low tan δ (0.020) at zero bias and room temperature. A pronounced electrical tunability ratio of 3.5:1 is observed on these devices. Devices show loss tangents as low as 0.003 in fields approaching 400 kV/cm. Electrical field calculations are based on cross-sectional atomic force microscopy (AFM) images that reveal a film thickness of 800 nm. Temperature dependent measurements show a T_max ∼ 230 K with a diffuse dielectric anomaly. Transmission electron microscopy (TEM) and atomic force microscopy (AFM) analyses indicate a conformal film with a mixed grain morphology and an abrupt Cu/BST interface.

Original language	English (US)
Pages (from-to)	301-306
Number of pages	6
Journal	Materials Research Society Symposium - Proceedings
Volume	784
DOIs	https://doi.org/10.1557/proc-784-c5.3
State	Published - Jan 1 2003
Event	Ferroelectric Thin Films XII - Boston, MA, United States Duration: Dec 1 2003 → Dec 4 2003

All Science Journal Classification (ASJC) codes

General Materials Science
Condensed Matter Physics
Mechanics of Materials
Mechanical Engineering

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title = "TEM and electrical analysis of sputtered barium strontium titanate (BST) thin films on flexible copper substrates",

abstract = "Ba0.6Sr0.4TiO3 (BST) films were deposited on copper foils by radio frequency magnetron sputtering. These films will be an integral part of flexible capacitor sheets intended for space borne re-configurable antenna arrays. By the use of controlled pO2 high temperature anneals, the films were fully crystallized in the absence of substrate oxidation. X-ray diffraction and transmission electron microscopy (TEM) showed no existence of copper oxidation (i.e. Cu2O or CuO phases). The deposited BST films exhibit a high permittivity (625) and a low tan δ (0.020) at zero bias and room temperature. A pronounced electrical tunability ratio of 3.5:1 is observed on these devices. Devices show loss tangents as low as 0.003 in fields approaching 400 kV/cm. Electrical field calculations are based on cross-sectional atomic force microscopy (AFM) images that reveal a film thickness of 800 nm. Temperature dependent measurements show a Tmax ∼ 230 K with a diffuse dielectric anomaly. Transmission electron microscopy (TEM) and atomic force microscopy (AFM) analyses indicate a conformal film with a mixed grain morphology and an abrupt Cu/BST interface.",

author = "Brian Laughlin and Jon Ihlefeld and Maria, {Jon Paul}",

year = "2003",

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doi = "10.1557/proc-784-c5.3",

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pages = "301--306",

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T1 - TEM and electrical analysis of sputtered barium strontium titanate (BST) thin films on flexible copper substrates

AU - Laughlin, Brian

AU - Ihlefeld, Jon

AU - Maria, Jon Paul

PY - 2003/1/1

Y1 - 2003/1/1

N2 - Ba0.6Sr0.4TiO3 (BST) films were deposited on copper foils by radio frequency magnetron sputtering. These films will be an integral part of flexible capacitor sheets intended for space borne re-configurable antenna arrays. By the use of controlled pO2 high temperature anneals, the films were fully crystallized in the absence of substrate oxidation. X-ray diffraction and transmission electron microscopy (TEM) showed no existence of copper oxidation (i.e. Cu2O or CuO phases). The deposited BST films exhibit a high permittivity (625) and a low tan δ (0.020) at zero bias and room temperature. A pronounced electrical tunability ratio of 3.5:1 is observed on these devices. Devices show loss tangents as low as 0.003 in fields approaching 400 kV/cm. Electrical field calculations are based on cross-sectional atomic force microscopy (AFM) images that reveal a film thickness of 800 nm. Temperature dependent measurements show a Tmax ∼ 230 K with a diffuse dielectric anomaly. Transmission electron microscopy (TEM) and atomic force microscopy (AFM) analyses indicate a conformal film with a mixed grain morphology and an abrupt Cu/BST interface.

AB - Ba0.6Sr0.4TiO3 (BST) films were deposited on copper foils by radio frequency magnetron sputtering. These films will be an integral part of flexible capacitor sheets intended for space borne re-configurable antenna arrays. By the use of controlled pO2 high temperature anneals, the films were fully crystallized in the absence of substrate oxidation. X-ray diffraction and transmission electron microscopy (TEM) showed no existence of copper oxidation (i.e. Cu2O or CuO phases). The deposited BST films exhibit a high permittivity (625) and a low tan δ (0.020) at zero bias and room temperature. A pronounced electrical tunability ratio of 3.5:1 is observed on these devices. Devices show loss tangents as low as 0.003 in fields approaching 400 kV/cm. Electrical field calculations are based on cross-sectional atomic force microscopy (AFM) images that reveal a film thickness of 800 nm. Temperature dependent measurements show a Tmax ∼ 230 K with a diffuse dielectric anomaly. Transmission electron microscopy (TEM) and atomic force microscopy (AFM) analyses indicate a conformal film with a mixed grain morphology and an abrupt Cu/BST interface.

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AN - SCOPUS:2942650909

SN - 0272-9172

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SP - 301

EP - 306

JO - Materials Research Society Symposium - Proceedings

JF - Materials Research Society Symposium - Proceedings

T2 - Ferroelectric Thin Films XII

Y2 - 1 December 2003 through 4 December 2003

ER -

TEM and electrical analysis of sputtered barium strontium titanate (BST) thin films on flexible copper substrates

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