TY - JOUR
T1 - Temperature dependence of liquid Sn sputtering by low-energy He + and D + bombardment
AU - Coventry, M. D.
AU - Allain, J. P.
AU - Ruzic, D. N.
N1 - Funding Information:
The authors would like to thank Dan Rokusek and Donna Carpenter for their experimental and data analysis efforts, Ning Li for performing the AES analysis, Bob Bastasz for insightful discussions about the liquid tin surface, and Brian Jurczyk for helpful discussions regarding EUV light source technology. Funding for this project was provided by the Department of Energy contract DOE DEFG 0299ER54515. The AES was performed at the Center for the Microanalysis of Materials, University of Illinois, which is partially supported by the US Department of Energy under grant DEFG02-91-ER45439.
PY - 2004/10/1
Y1 - 2004/10/1
N2 - Absolute sputtering yields of liquid tin from 240 to 420°C due to irradiation by low-energy helium and deuterium have been measured. For ion energies ranging from 300 to 1000 eV, temperature enhancement of liquid tin sputtering was noted. These measurements were obtained by IIAX (the Ion-surface InterAction experiment) using a velocity-filtered ion beam at 45° incidence to sputter material from a liquid tin target onto deposition monitors. Sputtering yields from 500 eV ion bombardment at 45° incidence increase from 0.1 ± 0.03 and 0.019 ± 0.008 Sn particles/ion at room temperature, for He + and D + ions respectively, to 0.30 ± 0.12 and 0.125 ± 0.05 Sn particles/ion for 380°C. Temperature enhanced sputtering has been seen in other liquid metals (namely lithium, tin-lithium, and gallium) using both ion beam and plasma irradiation.
AB - Absolute sputtering yields of liquid tin from 240 to 420°C due to irradiation by low-energy helium and deuterium have been measured. For ion energies ranging from 300 to 1000 eV, temperature enhancement of liquid tin sputtering was noted. These measurements were obtained by IIAX (the Ion-surface InterAction experiment) using a velocity-filtered ion beam at 45° incidence to sputter material from a liquid tin target onto deposition monitors. Sputtering yields from 500 eV ion bombardment at 45° incidence increase from 0.1 ± 0.03 and 0.019 ± 0.008 Sn particles/ion at room temperature, for He + and D + ions respectively, to 0.30 ± 0.12 and 0.125 ± 0.05 Sn particles/ion for 380°C. Temperature enhanced sputtering has been seen in other liquid metals (namely lithium, tin-lithium, and gallium) using both ion beam and plasma irradiation.
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U2 - 10.1016/j.jnucmat.2004.06.009
DO - 10.1016/j.jnucmat.2004.06.009
M3 - Article
AN - SCOPUS:19444384401
SN - 0022-3115
VL - 335
SP - 115
EP - 120
JO - Journal of Nuclear Materials
JF - Journal of Nuclear Materials
IS - 1
ER -