Abstract
The wafer fleure technique was modified to allow measurement of the e31f coefficient of films as a function of temperature between -55 and 85°C. Within films of a given composition, the thickest films exhibited the highest temperature dependences. This paper discusses and identifies the potential contributors to the measured variation in electromechanical response of the PZT films between -55 and 85°C.
Original language | English (US) |
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Pages (from-to) | 1397-1406 |
Number of pages | 10 |
Journal | Journal of Applied Physics |
Volume | 95 |
Issue number | 3 |
DOIs | |
State | Published - Feb 1 2004 |
All Science Journal Classification (ASJC) codes
- General Physics and Astronomy