Abstract
The wafer fleure technique was modified to allow measurement of the e31f coefficient of films as a function of temperature between -55 and 85°C. Within films of a given composition, the thickest films exhibited the highest temperature dependences. This paper discusses and identifies the potential contributors to the measured variation in electromechanical response of the PZT films between -55 and 85°C.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 1397-1406 |
| Number of pages | 10 |
| Journal | Journal of Applied Physics |
| Volume | 95 |
| Issue number | 3 |
| DOIs | |
| State | Published - Feb 1 2004 |
All Science Journal Classification (ASJC) codes
- General Physics and Astronomy