Abstract
Parylene is an important class of polymer thin film that has wide-ranging applications due to its well-recognized properties, such as low-dielectric constant, biocompatibility, and exceptional barrier properties. Here, we studied the deposition of parylene nanofibers by template-based and template-free methods, which combine both vapor deposition polymerization and oblique angle deposition. A comparative study of two approaches based on surface characterization techniques is presented. These nanofibers, deposited by both approaches, have potential applications in catalysis, biodetection, and biomedical coatings.
Original language | English (US) |
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Pages (from-to) | 4252-4255 |
Number of pages | 4 |
Journal | Thin Solid Films |
Volume | 518 |
Issue number | 15 |
DOIs | |
State | Published - May 31 2010 |
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Surfaces and Interfaces
- Surfaces, Coatings and Films
- Metals and Alloys
- Materials Chemistry