TY - JOUR
T1 - Template-based and template-free preparation of nanostructured parylene via oblique angle polymerization
AU - Demirel, Gökhan
AU - Malvadkar, Niranjan
AU - Demirel, Melik C.
N1 - Funding Information:
We thank the Office of Naval Research for financial support for this work through a Young Investigator's Program Award, and the Becton and Dickinson Technology for financial support.
Copyright:
Copyright 2010 Elsevier B.V., All rights reserved.
PY - 2010/5/31
Y1 - 2010/5/31
N2 - Parylene is an important class of polymer thin film that has wide-ranging applications due to its well-recognized properties, such as low-dielectric constant, biocompatibility, and exceptional barrier properties. Here, we studied the deposition of parylene nanofibers by template-based and template-free methods, which combine both vapor deposition polymerization and oblique angle deposition. A comparative study of two approaches based on surface characterization techniques is presented. These nanofibers, deposited by both approaches, have potential applications in catalysis, biodetection, and biomedical coatings.
AB - Parylene is an important class of polymer thin film that has wide-ranging applications due to its well-recognized properties, such as low-dielectric constant, biocompatibility, and exceptional barrier properties. Here, we studied the deposition of parylene nanofibers by template-based and template-free methods, which combine both vapor deposition polymerization and oblique angle deposition. A comparative study of two approaches based on surface characterization techniques is presented. These nanofibers, deposited by both approaches, have potential applications in catalysis, biodetection, and biomedical coatings.
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U2 - 10.1016/j.tsf.2009.12.096
DO - 10.1016/j.tsf.2009.12.096
M3 - Article
AN - SCOPUS:77953164971
SN - 0040-6090
VL - 518
SP - 4252
EP - 4255
JO - Thin Solid Films
JF - Thin Solid Films
IS - 15
ER -