Template-directed vapor-liquid-solid growth of silicon nanowires

Kok Keong Lew, Cordula Reuther, Altaf H. Carim, Joan M. Redwing, Benjamin R. Martin

Research output: Contribution to journalConference articlepeer-review

74 Scopus citations


Silicon (Si) nanowires in nanoporous anodic alumina membranes were synthesized using gold (Au) electrodeposition and vapor-liquid-solid growth at 500°C. High-resolution transmission electron microscopy showed that the nanowires consisted of Si core, oriented in 〈100〉 or 〈211〉 growth direction. Au terminated both ends of the growing wires which resulted in the formation of Au-Si-Au nanowires.

Original languageEnglish (US)
Pages (from-to)389-392
Number of pages4
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Issue number1
StatePublished - Jan 2002
Event6th International Workshop on Fabrication, Characterization, and Modeling of Ultra-Shallow Doping Profiles in Semiconductors - Napa Valley, CA, United States
Duration: Apr 22 2001Apr 26 2001

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Electrical and Electronic Engineering


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