Templating water stains for nanolithography

Wei Ssu Liao; Xin Chen; Jixin Chen; Paul S. Cremer

doi:10.1021/nl071195c

Templating water stains for nanolithography

Wei Ssu Liao, Xin Chen, Jixin Chen, Paul S. Cremer

Research output: Contribution to journal › Article › peer-review

23 Scopus citations

Abstract

Herein, a nanoscale patterning technique is demonstrated for creating twin features in polymers and metals. The process works by combining evaporative staining with a templating process. Well-ordered hexagonally arrayed double rings were fabricated using hydrophobic spherical templates. The diameter of the rings, the width of individual rings, and the spacing between concentric and adjacent rings could be tuned by varying the solution conditions. Arrays could be made without the outer ring by employing hydrophilic templates.

Original language	English (US)
Pages (from-to)	2452-2458
Number of pages	7
Journal	Nano letters
Volume	7
Issue number	8
DOIs	https://doi.org/10.1021/nl071195c
State	Published - Aug 2007

All Science Journal Classification (ASJC) codes

Bioengineering
General Chemistry
General Materials Science
Condensed Matter Physics
Mechanical Engineering

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10.1021/nl071195c

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title = "Templating water stains for nanolithography",

abstract = "Herein, a nanoscale patterning technique is demonstrated for creating twin features in polymers and metals. The process works by combining evaporative staining with a templating process. Well-ordered hexagonally arrayed double rings were fabricated using hydrophobic spherical templates. The diameter of the rings, the width of individual rings, and the spacing between concentric and adjacent rings could be tuned by varying the solution conditions. Arrays could be made without the outer ring by employing hydrophilic templates.",

author = "Liao, {Wei Ssu} and Xin Chen and Jixin Chen and Cremer, {Paul S.}",

year = "2007",

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AU - Liao, Wei Ssu

AU - Chen, Xin

AU - Chen, Jixin

AU - Cremer, Paul S.

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AB - Herein, a nanoscale patterning technique is demonstrated for creating twin features in polymers and metals. The process works by combining evaporative staining with a templating process. Well-ordered hexagonally arrayed double rings were fabricated using hydrophobic spherical templates. The diameter of the rings, the width of individual rings, and the spacing between concentric and adjacent rings could be tuned by varying the solution conditions. Arrays could be made without the outer ring by employing hydrophilic templates.

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Templating water stains for nanolithography

Abstract

All Science Journal Classification (ASJC) codes

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