TY - GEN
T1 - Temporal modulation of synchrotron x rays using torsional MEMS mirrors
AU - Walko, Donald A.
AU - Jung, Il Woong
AU - Lopez, Daniel
AU - Mukhopadhyay, Deepkishore
AU - Schwartz, Craig P.
AU - Shenoy, Gopal K.
AU - Wang, Jin
N1 - Copyright:
Copyright 2013 Elsevier B.V., All rights reserved.
PY - 2012
Y1 - 2012
N2 - We demonstrate the use of electrostatically driven micro-electromechanical systems (MEMS) devices to control and deliver synchrotron x-ray pulses at high repetition rates. Torsional MEMS micromirrors, rotating at duty cycles of 2 kHz and higher, were used to modulate grazing-incidence x rays, producing x-ray bunches shorter than 10 μs. We find that dynamic deformation of the oscillating micromirror is a limiting factor in the duration of the x-ray pulses produced, and we describe plans for reaching higher operating frequencies using mirrors designed for minimal deformation.
AB - We demonstrate the use of electrostatically driven micro-electromechanical systems (MEMS) devices to control and deliver synchrotron x-ray pulses at high repetition rates. Torsional MEMS micromirrors, rotating at duty cycles of 2 kHz and higher, were used to modulate grazing-incidence x rays, producing x-ray bunches shorter than 10 μs. We find that dynamic deformation of the oscillating micromirror is a limiting factor in the duration of the x-ray pulses produced, and we describe plans for reaching higher operating frequencies using mirrors designed for minimal deformation.
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U2 - 10.1117/12.930057
DO - 10.1117/12.930057
M3 - Conference contribution
AN - SCOPUS:84872558733
SN - 9780819492197
T3 - Proceedings of SPIE - The International Society for Optical Engineering
BT - Advances in X-Ray/EUV Optics and Components VII
T2 - Advances in X-Ray/EUV Optics and Components VII
Y2 - 13 August 2012 through 13 August 2012
ER -