Temporal modulation of synchrotron x rays using torsional MEMS mirrors

Donald A. Walko, Il Woong Jung, Daniel Lopez, Deepkishore Mukhopadhyay, Craig P. Schwartz, Gopal K. Shenoy, Jin Wang

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Scopus citations


We demonstrate the use of electrostatically driven micro-electromechanical systems (MEMS) devices to control and deliver synchrotron x-ray pulses at high repetition rates. Torsional MEMS micromirrors, rotating at duty cycles of 2 kHz and higher, were used to modulate grazing-incidence x rays, producing x-ray bunches shorter than 10 μs. We find that dynamic deformation of the oscillating micromirror is a limiting factor in the duration of the x-ray pulses produced, and we describe plans for reaching higher operating frequencies using mirrors designed for minimal deformation.

Original languageEnglish (US)
Title of host publicationAdvances in X-Ray/EUV Optics and Components VII
StatePublished - 2012
EventAdvances in X-Ray/EUV Optics and Components VII - San Diego, CA, United States
Duration: Aug 13 2012Aug 13 2012

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
ISSN (Print)0277-786X


ConferenceAdvances in X-Ray/EUV Optics and Components VII
Country/TerritoryUnited States
CitySan Diego, CA

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


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