Temporal modulation of synchrotron x rays using torsional MEMS mirrors

Donald A. Walko; Il Woong Jung; Daniel Lopez; Deepkishore Mukhopadhyay; Craig P. Schwartz; Gopal K. Shenoy; Jin Wang

doi:10.1117/12.930057

Temporal modulation of synchrotron x rays using torsional MEMS mirrors

Donald A. Walko
, Il Woong Jung
, Daniel Lopez
, Deepkishore Mukhopadhyay
, Craig P. Schwartz
, Gopal K. Shenoy
, Jin Wang

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

3 Scopus citations

Abstract

We demonstrate the use of electrostatically driven micro-electromechanical systems (MEMS) devices to control and deliver synchrotron x-ray pulses at high repetition rates. Torsional MEMS micromirrors, rotating at duty cycles of 2 kHz and higher, were used to modulate grazing-incidence x rays, producing x-ray bunches shorter than 10 μs. We find that dynamic deformation of the oscillating micromirror is a limiting factor in the duration of the x-ray pulses produced, and we describe plans for reaching higher operating frequencies using mirrors designed for minimal deformation.

Original language	English (US)
Title of host publication	Advances in X-Ray/EUV Optics and Components VII
DOIs	https://doi.org/10.1117/12.930057
State	Published - 2012
Event	Advances in X-Ray/EUV Optics and Components VII - San Diego, CA, United States Duration: Aug 13 2012 → Aug 13 2012

Publication series

Name	Proceedings of SPIE - The International Society for Optical Engineering
Volume	8502
ISSN (Print)	0277-786X

Conference

Conference	Advances in X-Ray/EUV Optics and Components VII
Country/Territory	United States
City	San Diego, CA
Period	8/13/12 → 8/13/12

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

Access to Document

10.1117/12.930057

Cite this

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title = "Temporal modulation of synchrotron x rays using torsional MEMS mirrors",

abstract = "We demonstrate the use of electrostatically driven micro-electromechanical systems (MEMS) devices to control and deliver synchrotron x-ray pulses at high repetition rates. Torsional MEMS micromirrors, rotating at duty cycles of 2 kHz and higher, were used to modulate grazing-incidence x rays, producing x-ray bunches shorter than 10 μs. We find that dynamic deformation of the oscillating micromirror is a limiting factor in the duration of the x-ray pulses produced, and we describe plans for reaching higher operating frequencies using mirrors designed for minimal deformation.",

author = "Walko, \{Donald A.\} and Jung, \{Il Woong\} and Daniel Lopez and Deepkishore Mukhopadhyay and Schwartz, \{Craig P.\} and Shenoy, \{Gopal K.\} and Jin Wang",

year = "2012",

doi = "10.1117/12.930057",

language = "English (US)",

isbn = "9780819492197",

series = "Proceedings of SPIE - The International Society for Optical Engineering",

booktitle = "Advances in X-Ray/EUV Optics and Components VII",

}

Walko, DA, Jung, IW, Lopez, D, Mukhopadhyay, D, Schwartz, CP, Shenoy, GK & Wang, J 2012, Temporal modulation of synchrotron x rays using torsional MEMS mirrors. in Advances in X-Ray/EUV Optics and Components VII., 85020H, Proceedings of SPIE - The International Society for Optical Engineering, vol. 8502, Advances in X-Ray/EUV Optics and Components VII, San Diego, CA, United States, 8/13/12. https://doi.org/10.1117/12.930057

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T1 - Temporal modulation of synchrotron x rays using torsional MEMS mirrors

AU - Walko, Donald A.

AU - Jung, Il Woong

AU - Lopez, Daniel

AU - Mukhopadhyay, Deepkishore

AU - Schwartz, Craig P.

AU - Shenoy, Gopal K.

AU - Wang, Jin

PY - 2012

Y1 - 2012

N2 - We demonstrate the use of electrostatically driven micro-electromechanical systems (MEMS) devices to control and deliver synchrotron x-ray pulses at high repetition rates. Torsional MEMS micromirrors, rotating at duty cycles of 2 kHz and higher, were used to modulate grazing-incidence x rays, producing x-ray bunches shorter than 10 μs. We find that dynamic deformation of the oscillating micromirror is a limiting factor in the duration of the x-ray pulses produced, and we describe plans for reaching higher operating frequencies using mirrors designed for minimal deformation.

AB - We demonstrate the use of electrostatically driven micro-electromechanical systems (MEMS) devices to control and deliver synchrotron x-ray pulses at high repetition rates. Torsional MEMS micromirrors, rotating at duty cycles of 2 kHz and higher, were used to modulate grazing-incidence x rays, producing x-ray bunches shorter than 10 μs. We find that dynamic deformation of the oscillating micromirror is a limiting factor in the duration of the x-ray pulses produced, and we describe plans for reaching higher operating frequencies using mirrors designed for minimal deformation.

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DO - 10.1117/12.930057

M3 - Conference contribution

AN - SCOPUS:84872558733

SN - 9780819492197

T3 - Proceedings of SPIE - The International Society for Optical Engineering

BT - Advances in X-Ray/EUV Optics and Components VII

T2 - Advances in X-Ray/EUV Optics and Components VII

Y2 - 13 August 2012 through 13 August 2012

ER -

Temporal modulation of synchrotron x rays using torsional MEMS mirrors

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All Science Journal Classification (ASJC) codes

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