TY - JOUR
T1 - Terahertz Characterization of Glass-Based Materials and Stackups for 6 G Microelectronics Packaging
AU - Zhai, Min
AU - Bhaskar, Pragna
AU - Shi, Haolian
AU - Swaminathan, Madhavan
AU - Locquet, Alexandre
AU - Citrin, D. S.
N1 - Publisher Copyright:
© 2023, The Author(s), under exclusive licence to Springer Science+Business Media, LLC, part of Springer Nature.
PY - 2023/12
Y1 - 2023/12
N2 - Glass-based materials, including polymer/glass stack ups, are attractive structural blocks for packaging substrates supporting 5 G and 6 G microelectronic modules and components. We present the first broadband characterization of AGC Inc. EN-A1 alkali-free boroaluminosilicate glass and of Ajinomoto Build-up Film (ABF) laminated on soda-lime float glass substrate from 200 GHz to 2.5 THz with a commercial terahertz time-domain spectroscopy (THz-TDS) system. The refractive index n(ν) , attenuation coefficient α(ν) , permittivity ε′(ν) , and loss tangent tan δ(ν) of EN-A1 glass as well as laminated ABF are nEN - A 1= 2.376 , αEN - A 1= 31.1 cm - 1 , εEN-A1′=5.64 , tan δEN - A 1= 0.062 , and nABF= 1.9 , αABF= 30 cm - 1 , εABF= 3.8 , tan δABF= 0.072 , all at 1 THz. Our results validate the promising perspective of both EN-A1 glass and ABF polymer materials as microwave and THz packaging solutions.
AB - Glass-based materials, including polymer/glass stack ups, are attractive structural blocks for packaging substrates supporting 5 G and 6 G microelectronic modules and components. We present the first broadband characterization of AGC Inc. EN-A1 alkali-free boroaluminosilicate glass and of Ajinomoto Build-up Film (ABF) laminated on soda-lime float glass substrate from 200 GHz to 2.5 THz with a commercial terahertz time-domain spectroscopy (THz-TDS) system. The refractive index n(ν) , attenuation coefficient α(ν) , permittivity ε′(ν) , and loss tangent tan δ(ν) of EN-A1 glass as well as laminated ABF are nEN - A 1= 2.376 , αEN - A 1= 31.1 cm - 1 , εEN-A1′=5.64 , tan δEN - A 1= 0.062 , and nABF= 1.9 , αABF= 30 cm - 1 , εABF= 3.8 , tan δABF= 0.072 , all at 1 THz. Our results validate the promising perspective of both EN-A1 glass and ABF polymer materials as microwave and THz packaging solutions.
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U2 - 10.1007/s10762-023-00951-0
DO - 10.1007/s10762-023-00951-0
M3 - Article
AN - SCOPUS:85178255634
SN - 1866-6892
VL - 44
SP - 841
EP - 857
JO - Journal of Infrared, Millimeter, and Terahertz Waves
JF - Journal of Infrared, Millimeter, and Terahertz Waves
IS - 11-12
ER -