Abstract
Integration of functional complex oxides with gallium nitride is attractive for advanced device architectures including smart FETs and high-temperature electronics. Inclusion of large bandgap interfacial oxide layers are of interest for band line-up compatibility. This presentation reviews work on the epitaxial growth of large bandgap rocksalt oxide buffer layers including MgO and CaO by molecular beam epitaxy. It also discusses the epitaxial deposition of ferroelectric oxides by rf magnetron sputtering.
Original language | English (US) |
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Title of host publication | 17th IEEE International Symposium on the Applications of Ferroelectrics, ISAF 2008 |
Volume | 2 |
DOIs | |
State | Published - Dec 1 2008 |
Event | 17th IEEE International Symposium on the Applications of Ferroelectrics, ISAF 2008 - Santa Fe, NM, United States Duration: Feb 23 2008 → Feb 28 2008 |
Other
Other | 17th IEEE International Symposium on the Applications of Ferroelectrics, ISAF 2008 |
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Country/Territory | United States |
City | Santa Fe, NM |
Period | 2/23/08 → 2/28/08 |
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Electrical and Electronic Engineering