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The analysis of wide band gap semiconductors using Raman spectroscopy
Sukwon Choi
, Eric Heller
, Donald Dorsey
, Samuel Graham
Mechanical Engineering
Research output
:
Chapter in Book/Report/Conference proceeding
›
Chapter
3
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Scopus citations
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Keyphrases
Raman Spectroscopy
100%
AlGaN Layer
100%
Wide Bandgap Semiconductors
100%
Device Performance
75%
GaN HEMT
50%
Residual Strain
50%
GaN Layers
50%
Processing Methods
25%
Tensile Strain
25%
Direct Measurement
25%
Residual Stress
25%
Mechanical Stress
25%
Defect States
25%
Substrate-induced
25%
Aluminum Gallium Nitride (AlGaN)
25%
Through-thickness
25%
Passivation
25%
Trap States
25%
Crystal Defects
25%
Device Reliability
25%
Al Content
25%
Heteroepitaxial Growth
25%
Large Electric Field
25%
Device Degradation
25%
Electrically Active Defects
25%
Engineering
Device Performance
100%
Gap Semiconductor
100%
Band Gap
100%
Residual Strain
66%
Processing Method
33%
Tensile Strain
33%
Mechanical Stress
33%
Passivation
33%
Main Issue
33%
Al Content
33%
Electric Field
33%
Imposed Strain
33%
Induced Residual Stress
33%
Material Science
Wide Band Gap Semiconductor
100%
Raman Spectroscopy
100%
Residual Strain
100%
Tensile Strain
50%
Residual Stress
50%
Mechanical Stress
50%
Crystal Defect
50%