Keyphrases
U-shaped Trench-gate MOSFET (UMOSFET)
100%
Gate Oxide
75%
Oxide Growth
50%
Oxides
25%
Scanning Electron Microscopy
25%
Metal Oxide
25%
Field-effect Transistors
25%
Trench Depth
25%
Electron Mobility
25%
Non-uniformity
25%
Pump Current
25%
Electrical Stress
25%
Charge Pump
25%
Cell Geometry
25%
Fowler-Nordheim
25%
Geometrical Parameters
25%
Spreading Resistance
25%
N-channel
25%
Isolated Device
25%
Trench Etching
25%
Engineering
Gate Oxide
100%
Silicon Oxide
50%
Oxide Growth
50%
Field-Effect Transistor
25%
Cross Section
25%
Cell Geometry
25%
Nonuniformity
25%
Geometrical Parameter
25%
Drain End
25%
Material Science
Oxide Compound
100%
Silicon
40%
Field Effect Transistor
20%
Scanning Electron Microscopy
20%
Metal Oxide
20%
Electron Mobility
20%
Earth and Planetary Sciences
Trench
100%
Scanning Electron Microscopy
11%
Nonuniformity
11%
Metal Oxide
11%
Silicon Oxide
11%
Electron Mobility
11%