TY - JOUR
T1 - The effects of relative humidity and reducing gases on the temperature coefficient of resonant frequency of ZnO based film bulk acoustic wave resonator
AU - Qiu, Xiaotun
AU - Wang, Ziyu
AU - Zhu, Jie
AU - Oiler, Jon
AU - Tang, Rui
AU - Yu, Cunjiang
AU - Yu, Hongyu
PY - 2010/9
Y1 - 2010/9
N2 - This study describes the influence of relative humidity (RH) and reducing gases on the temperature coefficient of resonant frequency (TCF) of ZnO-based film bulk acoustic wave resonator (FBAR). Upon exposure to moisture or reducing gases, the TCF of FBAR decreased. Water molecules can replace adsorbed oxygen on the ZnO surface. This process was less effective at high temperature, resulting in a lower TCF in high RH. Reducing gases, such as acetone, can reduce the density of ZnO through reaction with the adsorbed oxygen, leading to a lower TCF.
AB - This study describes the influence of relative humidity (RH) and reducing gases on the temperature coefficient of resonant frequency (TCF) of ZnO-based film bulk acoustic wave resonator (FBAR). Upon exposure to moisture or reducing gases, the TCF of FBAR decreased. Water molecules can replace adsorbed oxygen on the ZnO surface. This process was less effective at high temperature, resulting in a lower TCF in high RH. Reducing gases, such as acetone, can reduce the density of ZnO through reaction with the adsorbed oxygen, leading to a lower TCF.
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U2 - 10.1109/TUFFC.2010.1637
DO - 10.1109/TUFFC.2010.1637
M3 - Article
AN - SCOPUS:77957587724
SN - 0885-3010
VL - 57
SP - 1902
EP - 1905
JO - IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
JF - IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
IS - 9
M1 - 5585471
ER -