The effects of relative humidity and reducing gases on the temperature coefficient of resonant frequency of ZnO based film bulk acoustic wave resonator

Xiaotun Qiu; Ziyu Wang; Jie Zhu; Jon Oiler; Rui Tang; Cunjiang Yu; Hongyu Yu

doi:10.1109/TUFFC.2010.1637

The effects of relative humidity and reducing gases on the temperature coefficient of resonant frequency of ZnO based film bulk acoustic wave resonator

Xiaotun Qiu
, Ziyu Wang
, Jie Zhu
, Jon Oiler
, Rui Tang
, Cunjiang Yu
, Hongyu Yu

Engineering Science and Mechanics

Research output: Contribution to journal › Article › peer-review

8 Scopus citations

Abstract

This study describes the influence of relative humidity (RH) and reducing gases on the temperature coefficient of resonant frequency (TCF) of ZnO-based film bulk acoustic wave resonator (FBAR). Upon exposure to moisture or reducing gases, the TCF of FBAR decreased. Water molecules can replace adsorbed oxygen on the ZnO surface. This process was less effective at high temperature, resulting in a lower TCF in high RH. Reducing gases, such as acetone, can reduce the density of ZnO through reaction with the adsorbed oxygen, leading to a lower TCF.

Original language	English (US)
Article number	5585471
Pages (from-to)	1902-1905
Number of pages	4
Journal	IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
Volume	57
Issue number	9
DOIs	https://doi.org/10.1109/TUFFC.2010.1637
State	Published - Sep 2010

All Science Journal Classification (ASJC) codes

Instrumentation
Acoustics and Ultrasonics
Electrical and Electronic Engineering

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10.1109/TUFFC.2010.1637

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Qiu, X., Wang, Z., Zhu, J., Oiler, J., Tang, R., Yu, C., & Yu, H. (2010). The effects of relative humidity and reducing gases on the temperature coefficient of resonant frequency of ZnO based film bulk acoustic wave resonator. IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 57(9), 1902-1905. Article 5585471. https://doi.org/10.1109/TUFFC.2010.1637

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title = "The effects of relative humidity and reducing gases on the temperature coefficient of resonant frequency of ZnO based film bulk acoustic wave resonator",

abstract = "This study describes the influence of relative humidity (RH) and reducing gases on the temperature coefficient of resonant frequency (TCF) of ZnO-based film bulk acoustic wave resonator (FBAR). Upon exposure to moisture or reducing gases, the TCF of FBAR decreased. Water molecules can replace adsorbed oxygen on the ZnO surface. This process was less effective at high temperature, resulting in a lower TCF in high RH. Reducing gases, such as acetone, can reduce the density of ZnO through reaction with the adsorbed oxygen, leading to a lower TCF.",

author = "Xiaotun Qiu and Ziyu Wang and Jie Zhu and Jon Oiler and Rui Tang and Cunjiang Yu and Hongyu Yu",

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language = "English (US)",

volume = "57",

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Qiu, X, Wang, Z, Zhu, J, Oiler, J, Tang, R, Yu, C & Yu, H 2010, 'The effects of relative humidity and reducing gases on the temperature coefficient of resonant frequency of ZnO based film bulk acoustic wave resonator', IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, vol. 57, no. 9, 5585471, pp. 1902-1905. https://doi.org/10.1109/TUFFC.2010.1637

The effects of relative humidity and reducing gases on the temperature coefficient of resonant frequency of ZnO based film bulk acoustic wave resonator. / Qiu, Xiaotun; Wang, Ziyu; Zhu, Jie et al.
In: IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, Vol. 57, No. 9, 5585471, 09.2010, p. 1902-1905.

Research output: Contribution to journal › Article › peer-review

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AU - Yu, Cunjiang

AU - Yu, Hongyu

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AB - This study describes the influence of relative humidity (RH) and reducing gases on the temperature coefficient of resonant frequency (TCF) of ZnO-based film bulk acoustic wave resonator (FBAR). Upon exposure to moisture or reducing gases, the TCF of FBAR decreased. Water molecules can replace adsorbed oxygen on the ZnO surface. This process was less effective at high temperature, resulting in a lower TCF in high RH. Reducing gases, such as acetone, can reduce the density of ZnO through reaction with the adsorbed oxygen, leading to a lower TCF.

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The effects of relative humidity and reducing gases on the temperature coefficient of resonant frequency of ZnO based film bulk acoustic wave resonator

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All Science Journal Classification (ASJC) codes

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