Keyphrases
Substrate Effect
100%
Thin-film Transistors
100%
Polysilicon
80%
Silicon Substrate
40%
Fused Silica
40%
Leakage Current
20%
Si Substrate
20%
Fused Silica Substrate
20%
Gate Oxide
20%
Transistor Performance
20%
Impurities
20%
Silicon Oxide
20%
Field-assisted
20%
Substrate Influence
20%
Threshold Voltage
20%
Substrate Interface
20%
Oxide Interfaces
20%
Subthreshold Swing
20%
Voltage Swing
20%
Substrate Type
20%
N-channel
20%
Low Pressure Chemical Vapor Deposition (LPCVD)
20%
Channel Length
20%
Interface Properties
20%
P-channel
20%
Grain Geometry
20%
Polycrystalline Silicon Film
20%
Impurity Content
20%
Top Gate
20%
Engineering
Polysilicon
100%
Thin-Film Transistor
100%
Fused Silica
42%
Silicon Substrate
28%
Oxidized Si
28%
Si Substrate
14%
Gate Oxide
14%
Chemical Vapor Deposition
14%
Vapor Deposition
14%
Silicon Oxide
14%
Channel Length
14%
Substrate Interface
14%
Impurity Content
14%
Current Threshold
14%
Material Science
Silicon
100%
Thin-Film Transistor
100%
Hot Carrier
62%
Silicon Dioxide
37%
Film
25%
Oxide Compound
12%
Oxide Interface
12%
Low Pressure Chemical Vapor Deposition
12%
Interface Property
12%