The role of crystallographic orientation on the forces generated in ultra-precision grinding of anisotropic materials such as monocrystalline silicon

Eric Russell Marsh; R. Ryan Vallance

The role of crystallographic orientation on the forces generated in ultra-precision grinding of anisotropic materials such as monocrystalline silicon

Eric Russell Marsh, R. Ryan Vallance

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

This work presents a system of measuring grinding forces in precision applications. Several experiments demonstrate the performance in monitoring diamond wheel dressing, detecting workpiece contact, and process monitoring. The system appears promising for monitoring precision wafer grinding since this approach provides excellent sensitivity, high signal resolution, and good bandwidth.

Original language	English (US)
Title of host publication	Proceedings of the 21st Annual ASPE Meeting, ASPE 2006
State	Published - 2006
Event	21st Annual Meeting of the American Society for Precision Engineering, ASPE 2006 - Monterey, CA, United States Duration: Oct 15 2006 → Oct 20 2006

Other

Other	21st Annual Meeting of the American Society for Precision Engineering, ASPE 2006
Country/Territory	United States
City	Monterey, CA
Period	10/15/06 → 10/20/06

All Science Journal Classification (ASJC) codes

Mechanical Engineering

Cite this

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title = "The role of crystallographic orientation on the forces generated in ultra-precision grinding of anisotropic materials such as monocrystalline silicon",

abstract = "This work presents a system of measuring grinding forces in precision applications. Several experiments demonstrate the performance in monitoring diamond wheel dressing, detecting workpiece contact, and process monitoring. The system appears promising for monitoring precision wafer grinding since this approach provides excellent sensitivity, high signal resolution, and good bandwidth.",

author = "Marsh, {Eric Russell} and Vallance, {R. Ryan}",

year = "2006",

language = "English (US)",

isbn = "1887706410",

booktitle = "Proceedings of the 21st Annual ASPE Meeting, ASPE 2006",

note = "21st Annual Meeting of the American Society for Precision Engineering, ASPE 2006 ; Conference date: 15-10-2006 Through 20-10-2006",

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T1 - The role of crystallographic orientation on the forces generated in ultra-precision grinding of anisotropic materials such as monocrystalline silicon

AU - Marsh, Eric Russell

AU - Vallance, R. Ryan

PY - 2006

Y1 - 2006

N2 - This work presents a system of measuring grinding forces in precision applications. Several experiments demonstrate the performance in monitoring diamond wheel dressing, detecting workpiece contact, and process monitoring. The system appears promising for monitoring precision wafer grinding since this approach provides excellent sensitivity, high signal resolution, and good bandwidth.

AB - This work presents a system of measuring grinding forces in precision applications. Several experiments demonstrate the performance in monitoring diamond wheel dressing, detecting workpiece contact, and process monitoring. The system appears promising for monitoring precision wafer grinding since this approach provides excellent sensitivity, high signal resolution, and good bandwidth.

UR - http://www.scopus.com/inward/record.url?scp=84884794393&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84884794393&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:84884794393

SN - 1887706410

SN - 9781887706414

BT - Proceedings of the 21st Annual ASPE Meeting, ASPE 2006

T2 - 21st Annual Meeting of the American Society for Precision Engineering, ASPE 2006

Y2 - 15 October 2006 through 20 October 2006

ER -

The role of crystallographic orientation on the forces generated in ultra-precision grinding of anisotropic materials such as monocrystalline silicon

Abstract

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All Science Journal Classification (ASJC) codes

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