The role of Ga supersaturation on facet formation in the epitaxial lateral overgrowth of GaN

  • Ke Wang
  • , Ronny Kirste
  • , Seiji Mita
  • , Shun Washiyama
  • , Will Mecouch
  • , Pramod Reddy
  • , Ramón Collazo
  • , Zlatko Sitar

Research output: Contribution to journalArticlepeer-review

7 Scopus citations

Abstract

In this paper, facet formation of (0001) { 11 2 ¯ 0 } { 11 2 ¯ 2 } facets during epitaxial lateral overgrowth (ELO) of GaN is investigated for different Ga vapor supersaturations.

Original languageEnglish (US)
Article number032104
JournalApplied Physics Letters
Volume120
Issue number3
DOIs
StatePublished - Jan 17 2022

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy (miscellaneous)

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