The role of surface kinetics on composition and quality of AlGaN

Keyphrases

• Surface Kinetics 100%
• Aluminum Gallium Nitride (AlGaN) 100%
• Misorientation 100%
• AlN Substrate 100%
• Growth Rate 66%
• Step Bunching 66%
• Photoluminescence 33%
• Scanning Transmission Electron Microscopy 33%
• Electron Microscopy Studies 33%
• Single-crystalline 33%
• Surface Morphology 33%
• Sapphire Substrate 33%
• RMS Roughness 33%
• Compositional Variation 33%
• Atomically Smooth 33%
• Dislocation Density 33%
• Step Flow 33%
• Substrate Misorientation 33%
• Surface Diffusion Coefficient 33%
• Surface Saturation 33%
• Stepped Surfaces 33%
• AlGaN Film 33%

Material Science

• Aluminum Nitride 75%
• Film 50%
• Density 25%
• Photoluminescence 25%
• Nucleation 25%
• Sapphire 25%
• Scanning Transmission Electron Microscopy 25%
• Supersaturation 25%
• Surface Morphology 25%
• Surface Diffusion 25%

Engineering

• Surface Kinetics 100%
• Sapphire Substrate 33%
• Step Flow 33%
• Supersaturation 33%
• Surface Morphology 33%
• Diffusion Length 33%
• Dislocation Density 33%