The synthesization of Si nanocrystals embedded in HfO2 matrix by electron beam co-evaporation technique

Weilong Li, Rui Jia, Chen Chen, Ming Liu, Haofeng Li, Chenxin Zhu, Shibing Long

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Scopus citations


Silicon nanocrystals synthesized by electron beam co-evaporation (EBCE) of Si and HfO2 mixture are studied. HfO2 and Si powder are uniformly mixed together in certain proportion. The mixed Si & HfO 2 powder is evaporated by electron beam evaporation technique. Then the SRO thin films are annealed at different temperatures at 2 hours in N 2 ambient to synthesize Silicon nanocrystals. For the sample annealed at 1050°C at 2 hours, silicon nanocrystals with different size between 3 nm to 5 nm, the mean diameter of 4.0 nm, and the density of 3×10 12 cm-2 are evidently observed by high resolution transmission electron microscopy (HRTEM). Then the Raman scattering and photoluminescence spectra arising from Silicon nanocrystals are further confirmed the above result. In addition, the samples annealed at 900°C for 2 hours to 8 hours are carefully studied by Raman spectra. This way of preparing SRO thin films and Si NCs has unique advantage and is controllable and flexible.

Original languageEnglish (US)
Title of host publicationECS Transactions - ISTC/CSTIC 2009 (CISTC)
Number of pages4
Edition1 PART 2
StatePublished - 2009
EventISTC/CSTIC 2009 (CISTC) - Shanghai, China
Duration: Mar 19 2009Mar 20 2009

Publication series

NameECS Transactions
Number1 PART 2
ISSN (Print)1938-5862
ISSN (Electronic)1938-6737



All Science Journal Classification (ASJC) codes

  • General Engineering


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