TY - JOUR
T1 - The wafer flexure technique for the determination of the transverse piezoelectric coefficient (d31) of PZT thin films
AU - Shepard, J. F.
AU - Moses, P. J.
AU - Trolier-McKinstry, S.
N1 - Funding Information:
The authors would like to acknowledge Tao Su for his assistance in depositing the PZT films used in this study. The work presented here was funded under DARPA contract DABT63-95-C-0053.
PY - 1998/11/1
Y1 - 1998/11/1
N2 - This paper describes a simple and inexpensive method for evaluating the transverse piezoelectric coefficient (d31) of piezoelectric thin films. The technique is based upon the flexure of a coated substrate which imparts an ac two-dimensional stress to the piezoelectric film. The surface charge generated via the mechanical loading is converted to a voltage by an active integrator. Plate theory and elastic stress analyses are used to calculate the principal stresses applied to the film. The d31 coefficient can then be determined from knowledge of the electric charge produced and the calculated mechanical stress. For 52/48 sol-gel lead zirconate titanate (PZT) thin films, the d31 coefficient was found to range from -5 to -59 pC/N and is dependent on poling field.
AB - This paper describes a simple and inexpensive method for evaluating the transverse piezoelectric coefficient (d31) of piezoelectric thin films. The technique is based upon the flexure of a coated substrate which imparts an ac two-dimensional stress to the piezoelectric film. The surface charge generated via the mechanical loading is converted to a voltage by an active integrator. Plate theory and elastic stress analyses are used to calculate the principal stresses applied to the film. The d31 coefficient can then be determined from knowledge of the electric charge produced and the calculated mechanical stress. For 52/48 sol-gel lead zirconate titanate (PZT) thin films, the d31 coefficient was found to range from -5 to -59 pC/N and is dependent on poling field.
UR - http://www.scopus.com/inward/record.url?scp=0032207172&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=0032207172&partnerID=8YFLogxK
U2 - 10.1016/S0924-4247(98)00161-7
DO - 10.1016/S0924-4247(98)00161-7
M3 - Article
AN - SCOPUS:0032207172
SN - 0924-4247
VL - 71
SP - 133
EP - 138
JO - Sensors and Actuators, A: Physical
JF - Sensors and Actuators, A: Physical
IS - 1-2
ER -