The wafer flexure technique for the determination of the transverse piezoelectric coefficient (d₃₁) of PZT thin films

Keyphrases

• Active Integrator 50%
• Coated Substrate 50%
• Elastic Stress Analysis 50%
• Electric Charge 50%
• Flexure 100%
• Lead Zirconate Titanate 50%
• Mechanical Loading 50%
• Mechanical Stress 50%
• Piezoelectric Film 50%
• Piezoelectric Thin Film 50%
• Plate Theory 50%
• Poling Field 50%
• Principal Stress 50%
• PZT Thin Films 100%
• Sol-gel 50%
• Surface Charge 50%
• Transverse piezoelectric Coefficient 100%
• Two Dimensional 50%
• Wafer 100%

Engineering

• Applied Stress 33%
• Elastic Stress 33%
• Electric Charge 33%
• Flexure 100%
• Lead Zirconate 33%
• Mechanical Loading 33%
• Mechanical Stress 33%
• Piezoelectric 66%
• Piezoelectric Coefficient 100%
• Plate Theory 33%
• Thin Films 100%
• Titanate 33%
• Two Dimensional 33%

Material Science

• Film 50%
• Lead Zirconate Titanate 25%
• Mechanical Stress 25%
• Piezoelectricity 100%
• Sol-Gel 25%
• Stress Analysis 25%
• Surface Charge 25%
• Thin Films 100%