Theoretical studies of ion bombardment: Many-body interactions

Davy Y. Lo; Tom A. Tombrello; Mark H. Shapiro; Barbara J. Garrison; Nicholas Winograd; Don E. Harrison

doi:10.1116/1.575159

Theoretical studies of ion bombardment: Many-body interactions

Davy Y. Lo, Tom A. Tombrello, Mark H. Shapiro, Barbara J. Garrison, Nicholas Winograd, Don E. Harrison

Research output: Contribution to journal › Article › peer-review

17 Scopus citations

Abstract

Many-body forces obtained by the embedded-atom method are incorporated into the description of low-energy collisions and surface ejection processes in molecular dynamics simulations of sputtering from metal targets. Bombardment of small, single-crystal Cu targets (400–500 atoms) in three different orientations ({100}, {110}, {ill}) by 5-keV Ar⁺ ions have been simulated. The results are compared to simulations using purely pairwise additive interactions. Significant differences in the spectra of ejected atoms are found.

Original language	English (US)
Pages (from-to)	708-711
Number of pages	4
Journal	Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume	6
Issue number	3
DOIs	https://doi.org/10.1116/1.575159
State	Published - May 1988

All Science Journal Classification (ASJC) codes

Condensed Matter Physics
Surfaces and Interfaces
Surfaces, Coatings and Films

Access to Document

10.1116/1.575159

Cite this

@article{da191edd57a54169abc889635dc08691,

title = "Theoretical studies of ion bombardment: Many-body interactions",

abstract = "Many-body forces obtained by the embedded-atom method are incorporated into the description of low-energy collisions and surface ejection processes in molecular dynamics simulations of sputtering from metal targets. Bombardment of small, single-crystal Cu targets (400–500 atoms) in three different orientations (\{100\}, \{110\}, \{ill\}) by 5-keV Ar+ ions have been simulated. The results are compared to simulations using purely pairwise additive interactions. Significant differences in the spectra of ejected atoms are found.",

author = "Lo, \{Davy Y.\} and Tombrello, \{Tom A.\} and Shapiro, \{Mark H.\} and Garrison, \{Barbara J.\} and Nicholas Winograd and Harrison, \{Don E.\}",

year = "1988",

month = may,

doi = "10.1116/1.575159",

language = "English (US)",

volume = "6",

pages = "708--711",

journal = "Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films",

issn = "0734-2101",

publisher = "AVS Science and Technology Society",

number = "3",

}

TY - JOUR

T1 - Theoretical studies of ion bombardment

T2 - Many-body interactions

AU - Lo, Davy Y.

AU - Tombrello, Tom A.

AU - Shapiro, Mark H.

AU - Garrison, Barbara J.

AU - Winograd, Nicholas

AU - Harrison, Don E.

PY - 1988/5

Y1 - 1988/5

N2 - Many-body forces obtained by the embedded-atom method are incorporated into the description of low-energy collisions and surface ejection processes in molecular dynamics simulations of sputtering from metal targets. Bombardment of small, single-crystal Cu targets (400–500 atoms) in three different orientations ({100}, {110}, {ill}) by 5-keV Ar+ ions have been simulated. The results are compared to simulations using purely pairwise additive interactions. Significant differences in the spectra of ejected atoms are found.

AB - Many-body forces obtained by the embedded-atom method are incorporated into the description of low-energy collisions and surface ejection processes in molecular dynamics simulations of sputtering from metal targets. Bombardment of small, single-crystal Cu targets (400–500 atoms) in three different orientations ({100}, {110}, {ill}) by 5-keV Ar+ ions have been simulated. The results are compared to simulations using purely pairwise additive interactions. Significant differences in the spectra of ejected atoms are found.

UR - https://www.scopus.com/pages/publications/84912961511

UR - https://www.scopus.com/inward/citedby.url?scp=84912961511&partnerID=8YFLogxK

U2 - 10.1116/1.575159

DO - 10.1116/1.575159

M3 - Article

AN - SCOPUS:84912961511

SN - 0734-2101

VL - 6

SP - 708

EP - 711

JO - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

JF - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

IS - 3

ER -

Theoretical studies of ion bombardment: Many-body interactions

Abstract

All Science Journal Classification (ASJC) codes

Access to Document

Other files and links

Fingerprint

Cite this