Theory and New Applications of Ex Situ Lift Out

Lucille A. Giannuzzi; Zhiyang Yu; Denise Yin; Martin P. Harmer; Qiang Xu; Noel S. Smith; Lisa Chan; Jon Hiller; Dustin Hess; Trevor Clark

doi:10.1017/S1431927615013720

Theory and New Applications of Ex Situ Lift Out

Lucille A. Giannuzzi, Zhiyang Yu, Denise Yin, Martin P. Harmer, Qiang Xu, Noel S. Smith, Lisa Chan, Jon Hiller, Dustin Hess, Trevor Clark

Materials Characterization Lab

Research output: Contribution to journal › Article › peer-review

26 Scopus citations

Abstract

The ex situ lift out (EXLO) adhesion forces are reviewed and new applications of EXLO for focused ion beam (FIB)-prepared specimens are described. EXLO is used to manipulate electron transparent specimens on microelectromechanical systems carrier devices designed for in situ electron microscope analysis. A new patented grid design without a support film is described for EXLO. This new slotted grid design provides a surface for holding the specimen in place and also allows for post lift out processing. Specimens may be easily manipulated into a backside orientation to reduce FIB curtaining artifacts with this slotted grid. Large EXLO specimens can be manipulated from Xe⁺ plasma FIB prepared specimens. Finally, applications of EXLO and manipulation of FIB specimens using a vacuum probe lift out method are shown. The vacuum probe provides more control for placing specimens on the new slotted grids and also allows for easy manipulation into a backside configuration.

Original language	English (US)
Pages (from-to)	1034-1048
Number of pages	15
Journal	Microscopy and Microanalysis
Volume	21
Issue number	4
DOIs	https://doi.org/10.1017/S1431927615013720
State	Published - Apr 30 2015

All Science Journal Classification (ASJC) codes

Instrumentation

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10.1017/S1431927615013720

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@article{0e6e2fee1c1c4170acb5cbca7d963c2c,

title = "Theory and New Applications of Ex Situ Lift Out",

abstract = "The ex situ lift out (EXLO) adhesion forces are reviewed and new applications of EXLO for focused ion beam (FIB)-prepared specimens are described. EXLO is used to manipulate electron transparent specimens on microelectromechanical systems carrier devices designed for in situ electron microscope analysis. A new patented grid design without a support film is described for EXLO. This new slotted grid design provides a surface for holding the specimen in place and also allows for post lift out processing. Specimens may be easily manipulated into a backside orientation to reduce FIB curtaining artifacts with this slotted grid. Large EXLO specimens can be manipulated from Xe+ plasma FIB prepared specimens. Finally, applications of EXLO and manipulation of FIB specimens using a vacuum probe lift out method are shown. The vacuum probe provides more control for placing specimens on the new slotted grids and also allows for easy manipulation into a backside configuration.",

author = "Giannuzzi, {Lucille A.} and Zhiyang Yu and Denise Yin and Harmer, {Martin P.} and Qiang Xu and Smith, {Noel S.} and Lisa Chan and Jon Hiller and Dustin Hess and Trevor Clark",

note = "Publisher Copyright: {\textcopyright} {\textcopyright} Microscopy Society of America 2015.",

year = "2015",

month = apr,

day = "30",

doi = "10.1017/S1431927615013720",

language = "English (US)",

volume = "21",

pages = "1034--1048",

journal = "Microscopy and Microanalysis",

issn = "1431-9276",

publisher = "Oxford University Press",

number = "4",

}

TY - JOUR

T1 - Theory and New Applications of Ex Situ Lift Out

AU - Giannuzzi, Lucille A.

AU - Yu, Zhiyang

AU - Yin, Denise

AU - Harmer, Martin P.

AU - Xu, Qiang

AU - Smith, Noel S.

AU - Chan, Lisa

AU - Hiller, Jon

AU - Hess, Dustin

AU - Clark, Trevor

PY - 2015/4/30

Y1 - 2015/4/30

N2 - The ex situ lift out (EXLO) adhesion forces are reviewed and new applications of EXLO for focused ion beam (FIB)-prepared specimens are described. EXLO is used to manipulate electron transparent specimens on microelectromechanical systems carrier devices designed for in situ electron microscope analysis. A new patented grid design without a support film is described for EXLO. This new slotted grid design provides a surface for holding the specimen in place and also allows for post lift out processing. Specimens may be easily manipulated into a backside orientation to reduce FIB curtaining artifacts with this slotted grid. Large EXLO specimens can be manipulated from Xe+ plasma FIB prepared specimens. Finally, applications of EXLO and manipulation of FIB specimens using a vacuum probe lift out method are shown. The vacuum probe provides more control for placing specimens on the new slotted grids and also allows for easy manipulation into a backside configuration.

AB - The ex situ lift out (EXLO) adhesion forces are reviewed and new applications of EXLO for focused ion beam (FIB)-prepared specimens are described. EXLO is used to manipulate electron transparent specimens on microelectromechanical systems carrier devices designed for in situ electron microscope analysis. A new patented grid design without a support film is described for EXLO. This new slotted grid design provides a surface for holding the specimen in place and also allows for post lift out processing. Specimens may be easily manipulated into a backside orientation to reduce FIB curtaining artifacts with this slotted grid. Large EXLO specimens can be manipulated from Xe+ plasma FIB prepared specimens. Finally, applications of EXLO and manipulation of FIB specimens using a vacuum probe lift out method are shown. The vacuum probe provides more control for placing specimens on the new slotted grids and also allows for easy manipulation into a backside configuration.

UR - http://www.scopus.com/inward/record.url?scp=84938362939&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84938362939&partnerID=8YFLogxK

U2 - 10.1017/S1431927615013720

DO - 10.1017/S1431927615013720

M3 - Article

AN - SCOPUS:84938362939

SN - 1431-9276

VL - 21

SP - 1034

EP - 1048

JO - Microscopy and Microanalysis

JF - Microscopy and Microanalysis

IS - 4

ER -

Theory and New Applications of Ex Situ Lift Out

Abstract

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