TY - JOUR
T1 - Thermal biosensors from micromachined bulk acoustic wave resonators
AU - Lai, Son Vu Hoang
AU - Kao, Ping
AU - Tadigadapa, Srinivas
N1 - Funding Information:
This work was supported in part by a grant from the National Science Foundation Grant # ECCS 0925438, and the US Army Research Office Grant # W911NF-07-1-0327.
PY - 2011
Y1 - 2011
N2 - A micromachined Y-cut quartz resonator based thermal biosensor - configured with a reaction chamber that is physically separated but located in close proximity to the resonator for sensitive calorimetric biosensing applications is presented. The coupling of heat from the reaction chamber to the quartz resonator is achieved via radiation and conduction through ambient gas. This configuration of the sensor allows for a very robust sensing platform with no fouling of the sensor surface or degradation in its performance metrics. Frequency based and Impedance-based tracking of resonance frequency was used for chemical and enzymatic activity measurements and compared here. An impedance sensitivity of 852 Ω/°C (frequency sensitivity of 7.32 kHz/°C) was obtained for the 91 MHz.
AB - A micromachined Y-cut quartz resonator based thermal biosensor - configured with a reaction chamber that is physically separated but located in close proximity to the resonator for sensitive calorimetric biosensing applications is presented. The coupling of heat from the reaction chamber to the quartz resonator is achieved via radiation and conduction through ambient gas. This configuration of the sensor allows for a very robust sensing platform with no fouling of the sensor surface or degradation in its performance metrics. Frequency based and Impedance-based tracking of resonance frequency was used for chemical and enzymatic activity measurements and compared here. An impedance sensitivity of 852 Ω/°C (frequency sensitivity of 7.32 kHz/°C) was obtained for the 91 MHz.
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U2 - 10.1016/j.proeng.2011.12.341
DO - 10.1016/j.proeng.2011.12.341
M3 - Conference article
AN - SCOPUS:84857161824
SN - 1877-7058
VL - 25
SP - 1381
EP - 1384
JO - Procedia Engineering
JF - Procedia Engineering
T2 - 25th Eurosensors Conference
Y2 - 4 September 2011 through 7 September 2011
ER -