Fingerprint
Dive into the research topics of 'Thermal conductivity of plasma-enhanced atomic layer deposited hafnium zirconium oxide dielectric thin films'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Thermal conductivity of plasma-enhanced atomic layer deposited hafnium zirconium oxide dielectric thin films
Jihyun Kim, Sungje Lee, Yiwen Song, Sukwon Choi, Jihwan An, Jungwan Cho
Research output: Contribution to journal › Article › peer-review
3
Scopus
citations