Thermal damages on the surface of a silicon wafer induced by a near-infrared laser

Keyphrases

• Near-infrared Laser 100%
• Silicon Wafer 100%
• Irradiance 100%
• Thermal Damage 100%
• Laser-induced 75%
• Silicon Wafer Surface 75%
• Optical Microscopy 25%
• Laser Beams 25%
• Numerical Analysis 25%
• Thermal Heat 25%
• Surface Morphology 25%
• Fracture Strength 25%
• Thermal Stress 25%
• Partial Melting 25%
• Heat Transfer Model 25%

Engineering

• Silicon Wafer 100%
• near-Infrared Laser 100%
• Irradiance 80%
• Melting Point 80%
• Laser Irradiation 40%
• Thermal Stress 20%
• Experimental Finding 20%
• Continuous Wave 20%
• Surface Morphology 20%
• Fracture Strength 20%
• Fiber Laser 20%
• Laser Beams 20%

Physics

• Thermoelasticity 33%
• Partial Melting 33%
• Thermal Stress 33%