Thermochemical Nitridation of Microporous Silica Films in Ammonia

Keyphrases

• Ammonia 100%
• Nitridation 100%
• Microporous Silica 100%
• Silica Film 100%
• Ammonia Treatment 100%
• High Temperature 50%
• Silicon Substrate 50%
• Nitrogen Content 50%
• Ethanol 50%
• Amines 50%
• Oxynitride 50%
• Tetraethoxysilane 50%
• Homogeneous Films 50%
• Silicon Dioxide Thin Film 50%
• High-temperature Treatment 50%
• Microporous Silicon 50%
• Nitride Materials 50%

Material Science

• Film 100%
• Silicon Dioxide 100%
• Nitriding 100%
• Thin Films 50%
• Nitride Compound 50%
• Oxynitride 50%
• Tetraethyl Orthosilicate 50%
• Silicon Substrate 50%