Abstract
Nanowires of a diameter less than 50nm have been predicted to exhibit a higher thermoelectric figure of merit in comparison to their bulk equivalent. In order to experimentally measure the thermoelectric power in nanowires it is necessary to design and fabricate a measurement platform that is ideally matched in thermal and physical size and capable of testing a large number of individual nanowires in a high throughput manner. In this paper we present the design, fabrication, and characterization of a MEMS thermoelectric workbench with a high density of testing locations. Characteristic measurements of the thermoelectric power of Au nanowires are presented as demonstration of the workbench functionality.
Original language | English (US) |
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Title of host publication | MEMS/MOEMS Components and Their Applications V. Special Focus Topics |
Subtitle of host publication | Transducers at the Micro-Nano Interface |
Volume | 6885 |
DOIs | |
State | Published - Mar 31 2008 |
Event | MEMS/MOEMS Components and Their Applications V. Special Focus Topics: Transducers at the Micro-Nano Interface - San Jose, CA, United States Duration: Jan 21 2008 → Jan 22 2008 |
Other
Other | MEMS/MOEMS Components and Their Applications V. Special Focus Topics: Transducers at the Micro-Nano Interface |
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Country/Territory | United States |
City | San Jose, CA |
Period | 1/21/08 → 1/22/08 |
All Science Journal Classification (ASJC) codes
- Electrical and Electronic Engineering
- Condensed Matter Physics