Thin, crystalline MgO on hexagonal 6H-SiC (0001) by molecular beam epitaxy for functional oxide integration

Engineering & Materials Science

• Molecular beam epitaxy 100%
• Crystalline materials 67%
• Oxides 55%
• Oxygen 52%
• Ions 35%
• Magnesium 27%
• Thermodynamic stability 26%
• Reflection high energy electron diffraction 26%
• Plasmas 23%
• Vacuum 22%
• Molecular oxygen 22%
• Photoelectron spectroscopy 22%
• Gas discharge tubes 21%
• Fluxes 20%
• Plasma sources 20%
• Barium titanate 20%
• Film growth 20%
• Magnetron sputtering 17%
• Thick films 15%
• Energy gap 14%
• Etching 13%
• Nucleation 13%
• X ray diffraction 12%
• Adsorption 12%
• Thin films 12%
• X rays 11%
• Surface roughness 10%
• Substrates 9%
• Temperature 5%

Physics & Astronomy

• molecular beam epitaxy 54%
• oxides 40%
• oxygen 38%
• oxygen plasma 37%
• magnesium cells 33%
• deflection 28%
• thermal stability 28%
• ions 22%
• gas discharge tubes 20%
• vacuum 20%
• structural stability 18%
• barium titanates 18%
• x ray spectroscopy 16%
• high energy electrons 16%
• magnesium 15%
• thick films 15%
• plasma jets 15%
• templates 15%
• electron diffraction 13%
• magnetron sputtering 13%
• roughness 13%
• photoelectron spectroscopy 13%
• adsorption 12%
• etching 12%
• nucleation 12%
• broadband 11%
• diffraction 8%
• thin films 8%
• x rays 7%
• temperature 4%