Thin-fi lm piezoelectric MEMS

Keyphrases

• Micro-electro-mechanical Systems 100%
• Nanoelectromechanical Systems 80%
• Integration Density 40%
• Robotics 20%
• PbTiO3 20%
• Epitaxial 20%
• Actuator 20%
• Resonator 20%
• Pb(Zr,Ti)O3 20%
• Low Voltage 20%
• Energy Harvesting 20%
• Inkjet Printing 20%
• Fast Response 20%
• Driving Voltage 20%
• System Complexity 20%
• Integrated Control 20%
• Radio Frequency (RF) Front-end 20%
• High Integration 20%
• Control Electronics 20%
• Adaptive Radio 20%
• Ultrahigh piezoelectricity 20%
• Heterostructure Engineering 20%
• Fast Actuation 20%
• Large-scale Motions 20%
• Ultrasound Medical Imaging 20%

Engineering

• Piezoelectric 100%
• Microelectromechanical System 100%
• Nanoelectromechanical System 80%
• Transducer 40%
• Heterojunctions 20%
• Energy Harvesting 20%
• Actuation 20%
• Resonator 20%
• Theoretical Investigation 20%
• Inkjet Printing 20%
• Fast Response 20%
• Front End 20%
• Drive Voltage 20%
• Integrated Control 20%

Material Science

• Piezoelectricity 100%
• Microelectromechanical System 100%
• Density 40%
• Heterojunction 20%
• Actuator 20%
• Aluminum Nitride 20%
• Resonator 20%