TY - GEN
T1 - Thin film anodized titania nanotubes-based oxygen sensor
AU - Viegas, Alison E.
AU - Chatterjee, Debaditya
AU - Choudhury, Tanushree H.
AU - Raghavan, Srinivasan
AU - Bhat, Navakanta
N1 - Publisher Copyright:
© 2014 IEEE.
PY - 2014
Y1 - 2014
N2 - Anodized titania, synthesized on oxidized silicon substrate, has been used as oxygen gas sensor. The as-anodized films resulted in a sensitivity of 5756% at 125°C, when exposed to 100% oxygen. The gas-sensing performance of anodized films has been evaluated with post-anodization treatment in de-ionized water and aqueous ammonia solution. The sensitivity increases to 8646% and 16599%, with post-treatment in aqueous ammonia solution and de-ionized water, respectively. This is attributed to increase surface area and activation during the post- anodization treatment. The repeatability of sensor performance has also been evaluated, and it is observed that the de-ionized water treated film is unstable for repeated sensing, possibly due to some structural modifications.
AB - Anodized titania, synthesized on oxidized silicon substrate, has been used as oxygen gas sensor. The as-anodized films resulted in a sensitivity of 5756% at 125°C, when exposed to 100% oxygen. The gas-sensing performance of anodized films has been evaluated with post-anodization treatment in de-ionized water and aqueous ammonia solution. The sensitivity increases to 8646% and 16599%, with post-treatment in aqueous ammonia solution and de-ionized water, respectively. This is attributed to increase surface area and activation during the post- anodization treatment. The repeatability of sensor performance has also been evaluated, and it is observed that the de-ionized water treated film is unstable for repeated sensing, possibly due to some structural modifications.
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U2 - 10.1109/ICEmElec.2014.7151130
DO - 10.1109/ICEmElec.2014.7151130
M3 - Conference contribution
AN - SCOPUS:84988227341
T3 - 2014 IEEE 2nd International Conference on Emerging Electronics: Materials to Devices, ICEE 2014 - Conference Proceedings
BT - 2014 IEEE 2nd International Conference on Emerging Electronics
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 2014 2nd IEEE International Conference on Emerging Electronics, ICEE 2014
Y2 - 3 December 2014 through 6 December 2014
ER -